FABRICATION OF PERIODIC SUBMICRON DOT STRUCTURES OF N-INP BY LASER-INDUCED SURFACE ELECTROMAGNETIC-WAVE ETCHING

被引：3

作者：

KUMAGAI, H ^{[1
]}

EZAKI, M ^{[1
]}

TOYODA, K ^{[1
]}

OBARA, M ^{[1
]}

机构：

[1] KEIO UNIV,DEPT ELECT ENGN,KOHOKU KU,YOKOHAMA,KANAGAWA 223,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1992年 / 31卷 / 7B期

关键词：

LASER; SURFACE ELECTROMAGNETIC WAVES; ETCHING; DOTS; HOLOGRAPHIC EXPOSURE;

D O I：

10.1143/JJAP.31.L928

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Periodic submicron dot structures were fabricated by laser-induced surface electromagnetic wave etching of indium phosphide substrates. The shape of the dot was observed as a cone whose diameter at the half maximum was about 0.2-mu-m. Periods along two perpendicular axes were 0.38-mu-m and 0.57-mu-m, respectively. The periods were nearly in agreement with the calculation.

引用

页码：L928 / L930

页数：3

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