X-RAY-LITHOGRAPHY BEAMLINES AT ALADDIN

被引：20

作者：

WELLS, GM ^{[1
]}

LAI, B ^{[1
]}

SO, D ^{[1
]}

REDAELLI, R ^{[1
]}

CERRINA, F ^{[1
]}

机构：

[1] UNIV WISCONSIN,WISCONSIN CTR X-RAY LITHOG,MADISON,WI 53706

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1988年 / 266卷 / 1-3期

关键词：

D O I：

10.1016/0168-9002(88)90397-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：278 / 286

页数：9

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