X-RAY-LITHOGRAPHY BEAMLINES AT ALADDIN

被引：20
|
作者：
WELLS, GM [1 ]
LAI, B [1 ]
SO, D [1 ]
REDAELLI, R [1 ]
CERRINA, F [1 ]
机构：
[1] UNIV WISCONSIN,WISCONSIN CTR X-RAY LITHOG,MADISON,WI 53706
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1988年 / 266卷 / 1-3期
关键词：
D O I：
10.1016/0168-9002(88)90397-X
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：278 / 286
页数：9
相关论文
共 50 条
  • [1] ABSOLUTE FLUX MEASUREMENTS FOR X-RAY-LITHOGRAPHY BEAMLINES
    BASZLER, F
    HANSEN, M
    CERRINA, F
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06): : 1529 - 1534
  • [2] APPLICATIONS OF FACETED MIRRORS TO X-RAY-LITHOGRAPHY BEAMLINES
    CHEN, GJ
    GUO, JZY
    CERRINA, F
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1994, 347 (1-3): : 238 - 243
  • [3] EVALUATION OF BERYLLIUM FOILS FOR X-RAY-LITHOGRAPHY BEAMLINES
    WELLS, GM
    BRODSKY, EL
    CERRINA, F
    WALDO, WG
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06): : 3008 - 3011
  • [4] BEAMLINES FOR THIN AND THICK RESIST X-RAY-LITHOGRAPHY
    DAHLBACKA, GH
    PEARCE, J
    YOUNGER, F
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1992, 319 (1-3): : 359 - 365
  • [5] X-RAY-LITHOGRAPHY BEAMLINES IN THE IBM-ADVANCED-LITHOGRAPHY-FACILITY
    SILVERMAN, JP
    RIPPSTEIN, RP
    OBERSCHMIDT, JM
    IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1993, 37 (03) : 395 - 410
  • [6] THE CENTER FOR X-RAY-LITHOGRAPHY FACILITY STATUS AND BEAMLINES DEVELOPMENT
    WELLS, GM
    BRODSKY, EL
    REILLY, M
    TAYLOR, JW
    CERRINA, F
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1994, 347 (1-3): : 466 - 471
  • [7] MICROMECHANICS FOR X-RAY-LITHOGRAPHY AND X-RAY-LITHOGRAPHY FOR MICROMECHANICS
    GUCKEL, H
    PRECISION ENGINEERING AND OPTOMECHANICS, 1989, 1167 : 151 - 158
  • [8] EFFICIENT EXTRACTION WINDOW FOR HIGH-THROUGHPUT X-RAY-LITHOGRAPHY BEAMLINES
    KURODA, K
    KANEKO, T
    ITABASHI, S
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (02): : 2151 - 2153
  • [9] X-RAY-LITHOGRAPHY
    HEUBERGER, A
    SOLID STATE TECHNOLOGY, 1986, 29 (02) : 93 - 101
  • [10] X-RAY-LITHOGRAPHY
    HEUBERGER, A
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (01): : 107 - 121
12345