THE EFFECT OF ION MASS AND TARGET TEMPERATURE ON THE ENERGY-DISTRIBUTION OF SPUTTERED ATOMS

被引：21
作者：
AHMAD, S
FARMERY, BW
THOMPSON, MW
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS | 1980年 / 170卷 / 1-3期
关键词：
D O I：
10.1016/0029-554X(80)91034-4
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：327 / 330
页数：4
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