STRUCTURE OF THE BORON-HYDROGEN COMPLEX IN CRYSTALLINE SILICON

被引：70

作者：

MARWICK, AD ^{[1
]}

OEHRLEIN, GS ^{[1
]}

JOHNSON, NM ^{[1
]}

机构：

[1] XEROX CORP,PALO ALTO RES CTR,PALO ALTO,CA 94304

来源：

PHYSICAL REVIEW B | 1987年 / 36卷 / 08期

关键词：

D O I：

10.1103/PhysRevB.36.4539

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：4539 / 4542

页数：4

共 19 条

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[4]

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[7]

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[8]

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[9] MECHANISM FOR HYDROGEN COMPENSATION OF SHALLOW-ACCEPTOR IMPURITIES IN SINGLE-CRYSTAL SILICON [J].

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[10]

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