METALLORGANIC VAPOR-PHASE EPITAXY REACTOR FOR INSITU OPTICAL INVESTIGATIONS

被引：2

作者：

VAILLE, M ^{[1
]}

FAVRE, R ^{[1
]}

MONTEIL, Y ^{[1
]}

BOUIX, J ^{[1
]}

GIBART, P ^{[1
]}

机构：

[1] UNIV LYON 1,PHYSICOCHIM MINERAL LAB 1,F-69622 VILLEURBANNE,FRANCE

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1988年 / 59卷 / 01期

关键词：

D O I：

10.1063/1.1139995

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：167 / 171

页数：5

共 50 条

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[29] VAPOR-PHASE EPITAXY OF GAINASP AND INP [J].

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[30] REMOTE OPTICAL MONITORING OF REACTANTS IN A VAPOR-PHASE EPITAXIAL REACTOR [J].

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