SPUTTER-DEPOSITION OF YBACUO THIN-FILMS - PROBLEMS AND PROSPECTS

被引：0
|
作者：
MOHAN, S
MURALIDHAR, GK
机构：
来源：
METALS MATERIALS AND PROCESSES | 1994年 / 5卷 / 04期
关键词：
YBACUO; THIN FILMS; SPUTTER DEPOSITION;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：233 / 246
页数：14
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