NEW GROUP-III ALUMINUM AND GALLIUM HYDRIDE PRECURSORS FOR METAL ORGANIC VAPOR-PHASE EPITAXY

被引：8

作者：

DORN, R ^{[1
]}

MULLER, M ^{[1
]}

LORBERTH, J ^{[1
]}

ZIMMERMANN, G ^{[1
]}

PROTZMANN, H ^{[1
]}

STOLZ, W ^{[1
]}

GOBEL, EO ^{[1
]}

机构：

[1] UNIV MARBURG,FACHBEREICH CHEM,WISSENSCHAFTLICHES ZENTRUM MAT WISSENSCH,HANS MEERWEIN STR,W-3550 MARBURG,GERMANY

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1993年 / 17卷 / 1-3期

关键词：

D O I：

10.1016/0921-5107(93)90076-Y

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

New group III hydride precursors have been synthesized in high yield and their purities have been measured by atomic absorption spectroscopy analysis, ion chromatography and metal-organic vapour-phase epitaxy. With these compounds, which have no metal-to-carbon bond, a decrease in carbon incorporation into (Al, Ga)As/GaAs heterostructures is achieved. The efficient combination of these sources with organoarsines at lower V-to-III ratios allows for a replacement of the highly toxic AsH3 by new alternative group V precursors, which show remarkable lower toxicities.

引用

页码：25 / 28

页数：4

共 27 条

[1] COMPENSATION IN HEAVILY DOPED N-TYPE INP AND GAAS [J].

ANDERSON, DA ;

APSLEY, N ;

DAVIES, P ;

GILES, PL .

JOURNAL OF APPLIED PHYSICS, 1985, 58 (08) :3059-3067

[2]

ARCHER R, 1965, INORG CHEM, V4, P1358

[3]

ASHBY EC, 1966, ADV INORG CHEM RAD, V8, P283

[4] POLYDENTATE TERTIARY AMINE ALUMINUM-HYDRIDE ADDUCTS - MONOMERIC VERSUS POLYMERIC SPECIES [J].

ATWOOD, JL ;

BENNETT, FR ;

JONES, C ;

KOUTSANTONIS, GA ;

RASTON, CL ;

ROBINSON, KD .

JOURNAL OF THE CHEMICAL SOCIETY-CHEMICAL COMMUNICATIONS, 1992, (07) :541-543

[5] MOLECULAR ADDITION-COMPOUNDS .7. SYNTHESIS OF ADDITION-COMPOUNDS OF BORON-TRIFLUORIDE, BORANE, AND ALANE WITH N,N,N',N'-TETRAMETHYLETHYLENEDIAMINE AND TRIETHYLENEDIAMINE BY PRECIPITATION FROM ETHER SOLVENTS [J].

BROWN, HC ;

SINGARAM, B .

INORGANIC CHEMISTRY, 1980, 19 (02) :455-457

[6] COMPOSITION OF COMPLEX METAL HYDRIDES IN POLAR SOLVENTS .1. TERTIARY AMINES [J].

DILTS, JA ;

ASHBY, EC .

INORGANIC CHEMISTRY, 1970, 9 (04) :855-&

[7]

DORN R, 1992, THESIS PHILIPPS U MA

[8] GALLANE AT LAST - SYNTHESIS AND PROPERTIES OF BINARY GALLIUM HYDRIDE [J].

DOWNS, AJ ;

GOODE, MJ ;

PULHAM, CR .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1989, 111 (05) :1936-1937

[9] LITHIUM ALUMINUM HYDRIDE, ALUMINUM HYDRIDE AND LITHIUM GALLIUM HYDRIDE, AND SOME OF THEIR APPLICATIONS IN ORGANIC AND INORGANIC CHEMISTRY [J].

FINHOLT, AE ;

BOND, AC ;

SCHLESINGER, HI .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1947, 69 (05) :1199-1203

[10]

FRIGO D, 1991, 4TH EUR WORKSH MET O

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