SPECIFIC CONTACT RESISTIVITY MEASUREMENT BY A VERTICAL KELVIN TEST STRUCTURE

被引：9

作者：

TAN, FL ^{[1
]}

LEU, LY ^{[1
]}

CHUNG, LL ^{[1
]}

机构：

[1] NATL CHIAO TUNG UNIV, DEPT ELECT ENGN, HSINCHU, TAIWAN

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1987年 / 34卷 / 06期

关键词：

D O I：

10.1109/T-ED.1987.23096

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：1390 / 1395

页数：6

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