ION NITRIDING OF ARMCO IRON IN VARIOUS GLOW-DISCHARGE REGIONS

被引:14
|
作者
MICHALSKI, J
机构
[1] Institute of Precision Mechanics, 00-967 Warsaw, PO Box 11
来源
SURFACE & COATINGS TECHNOLOGY | 1993年 / 59卷 / 1-3期
关键词
D O I
10.1016/0257-8972(93)90105-W
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
This paper presents the first results of a study of plasma nitriding in various regions of a d.c. glow discharge, i.e. on the cathode, on the anode, and on a substrate isolated from the cathode and anode (at plasma potential). The results obtained reveal differences in the growth kinetics and surface morphology of the nitriding layers, depending on the region where the nitriding process took place. The aim of this work was to study the role of low temperature plasma in the plasma nitriding process. The processes were carried out in an apparatus for plasma treatment with a hot anode.
引用
收藏
页码:321 / 324
页数:4
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