FABRICATION OF MICROMECHANICAL DEVICES FROM POLYSILICON FILMS WITH SMOOTH SURFACES

被引：123

作者：

GUCKEL, H ^{[1
]}

SNIEGOWSKI, JJ ^{[1
]}

CHRISTENSON, TR ^{[1
]}

MOHNEY, S ^{[1
]}

KELLY, TF ^{[1
]}

机构：

[1] UNIV WISCONSIN,CTR MAT SCI,MADISON,WI 53706

来源：

SENSORS AND ACTUATORS | 1989年 / 20卷 / 1-2期

关键词：

D O I：

10.1016/0250-6874(89)87109-4

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：117 / 122

页数：6

共 13 条

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[9]

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