共 50 条
- [11] LASER DRIVER FOR SOFT-X-RAY PROJECTION LITHOGRAPHY APPLIED OPTICS, 1993, 32 (34): : 6914 - 6919
- [12] WAVELENGTH CONSIDERATIONS IN SOFT-X-RAY PROJECTION LITHOGRAPHY APPLIED OPTICS, 1993, 32 (34): : 7062 - 7067
- [13] SOFT-X-RAY PROJECTION LITHOGRAPHY EXPERIMENTS USING SCHWARZSCHILD IMAGING OPTICS APPLIED OPTICS, 1993, 32 (34): : 7068 - 7071
- [14] PHYSICAL OPTICS MODELING IN SOFT-X-RAY PROJECTION LITHOGRAPHY APPLIED OPTICS, 1993, 32 (34): : 6945 - 6951
- [15] DEFECT REPAIR FOR SOFT-X-RAY PROJECTION LITHOGRAPHY MASKS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06): : 3134 - 3140
- [16] MULTILAYER MIRROR TECHNOLOGY FOR SOFT-X-RAY PROJECTION LITHOGRAPHY APPLIED OPTICS, 1993, 32 (34): : 6952 - 6960
- [17] Alternative soft-x-ray source for step and scan lithography ELECTRON-BEAM, X-RAY, EUV, AND ION-BEAM SUBMICROMETER LITHOGRAPHIES FOR MANUFACTURING VI, 1996, 2723 : 288 - 298
- [18] SOFT-X-RAY LITHOGRAPHY USING RADIATION FROM LASER-PRODUCED PLASMAS APPLIED OPTICS, 1985, 24 (13): : 2024 - 2027
- [19] LASER-PLASMA SOURCES FOR SOFT-X-RAY PROJECTION LITHOGRAPHY JOURNAL DE PHYSIQUE III, 1994, 4 (09): : 1669 - 1677
- [20] CHARACTERIZATION OF CHEMICALLY AMPLIFIED RESISTS FOR SOFT-X-RAY PROJECTION LITHOGRAPHY JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06): : 2593 - 2599