TRANSPARENT AND HIGHLY ORIENTED ZNO FILMS GROWN AT LOW-TEMPERATURE BY SPUTTERING WITH A MODIFIED SPUTTER GUN

被引：9
作者：
ONISHI, S
ESCHWEI, M
WANG, WC
机构：
来源：
APPLIED PHYSICS LETTERS | 1981年 / 38卷 / 06期
关键词：
D O I：
10.1063/1.92381
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：419 / 421
页数：3
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