LOW-TEMPERATURE PHOTO-CVD SILICON-NITRIDE - PROPERTIES AND APPLICATIONS

被引：0
|
作者：
PETERS, JW
GEBHART, FL
HALL, TC
机构：
来源：
SOLID STATE TECHNOLOGY | 1980年 / 23卷 / 09期
关键词：
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
SILICON COMPOUNDS - Films
引用
收藏
页码：121 / 126
页数：6
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