MEASUREMENT OF ALUMINUM FILM THICKNESS

被引:1
|
作者
HADLEY, CP
机构
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 1956年 / 27卷 / 03期
关键词
D O I
10.1063/1.1715517
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:176 / 176
页数:1
相关论文
共 50 条
  • [31] Film thickness measurement tool with a stress measurement function
    Horie, Masahiro
    Akashika, Kumiko
    Shiota, Shuji
    Yamaguchi, Shinji
    Yamano, Kakumichi
    METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXII, PTS 1 AND 2, 2008, 6922 (1-2):
  • [32] Nanoscale film thickness measurement based on weak measurement
    Qin, Zirui
    Liu, Qinggang
    Yue, Chong
    Lang, Yaopu
    Zhou, Xinglin
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2020, 91 (12):
  • [33] Effect of Film Thickness on Energy Transport Characteristics in Aluminum Thin Film
    Ali, H.
    Yilbas, B. S.
    JOURNAL OF THERMOPHYSICS AND HEAT TRANSFER, 2015, 29 (04) : 711 - 724
  • [34] MEASUREMENT OF FILM THICKNESS OF THIN-FILM RESISTANCE THERMOMETERS
    MCCAA, DJ
    AIAA JOURNAL, 1968, 6 (04) : 747 - &
  • [35] Measurement of liquid film thickness by a fringe method
    Kariyasaki, Akira
    Ousaka, Akiharu
    Yamasaki, Yoshikazu
    Kagawa, Masazumi
    Nagashima, Tohru
    Morooka, Sigeharu
    ICNMM2007: PROCEEDINGS OF THE 5TH INTERNATIONAL CONFERENCE ON NANOCHANNELS, MICROCHANNELS, AND MINICHANNELS, 2007, : 891 - 897
  • [36] MEASUREMENT OF A DIELECTRIC FILM THICKNESS IN COURSE OF SPRAYING
    YAGOLA, YG
    MINAICHE.VE
    MEASUREMENT TECHNIQUES-USSR, 1966, (05): : 655 - &
  • [37] Measurement of thickness and composition of a solvent film on a bubble
    Tarkan, H. M.
    Gelinas, S.
    Finch, J. A.
    JOURNAL OF COLLOID AND INTERFACE SCIENCE, 2006, 297 (02) : 732 - 737
  • [38] Research of Film Thickness Online Measurement System
    He, Ping
    Zhang, Hongjian
    Liu, Chao
    Cao, Shengmei
    SENSORS, MECHATRONICS AND AUTOMATION, 2014, 511-512 : 315 - 318
  • [39] AN OPTICAL METHOD FOR THE MEASUREMENT OF UNSTEADY FILM THICKNESS
    OZDEMIR, IB
    WHITELAW, JH
    EXPERIMENTS IN FLUIDS, 1992, 13 (05) : 321 - 331
  • [40] Measurement of the thickness of film formed on glass and sand
    Pettijohn, E
    JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1919, 41 : 477 - 486