ESTIMATION OF SPUTTERING RATE BY BOMBARDMENT WITH ARGON GAS IONS

被引：13
作者：
OKAJIMA, Y
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 01期
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D O I：
10.1063/1.327331
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：715 / 717
页数：3
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