IMPROVED DRIFT IN 2-PHASE, LONG-CHANNEL, SHALLOW BURIED-CHANNEL CCDS WITH LONGITUDINALLY NONUNIFORM STORAGE-GATE IMPLANTS

被引:2
作者
LATTES, AL [1 ]
MUNROE, SC [1 ]
SEAVER, MM [1 ]
MURGUIA, JE [1 ]
MELNGAILIS, J [1 ]
机构
[1] MIT,DEPT ELECT ENGN & COMP SCI,ELECTR RES LAB,CAMBRIDGE,MA 02139
关键词
D O I
10.1109/16.141248
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Two-phase buried-channel CCD's with a gradient in the storage wells, generated by a nonuniform channel doping parallel to the surface, were studied at room temperature and at 77 K. The built-in drift fields improve the charge transfer efficiency by more than an order of magnitude, consistently with two-dimensional simulations.
引用
收藏
页码:1772 / 1774
页数:3
相关论文
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