ANALYSIS OF PROCESSING INDUCED DOPANT REDISTRIBUTION IN LARGE-SCALE INTEGRATED-CIRCUITS BY UTILIZING SIMS

被引：0
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作者：
PALKUTI, LJ [1 ]
机构：
[1] USN,RES LAB,ELECTR DIV,WASHINGTON,DC 20390
来源：
REPORT OF NRL PROGRESS | 1973年 / SEP期
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中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
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页码：38 / 40
页数：3
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