ANALYSIS OF PROCESSING INDUCED DOPANT REDISTRIBUTION IN LARGE-SCALE INTEGRATED-CIRCUITS BY UTILIZING SIMS

被引：0

作者：

PALKUTI, LJ ^{[1
]}

机构：

[1] USN,RES LAB,ELECTR DIV,WASHINGTON,DC 20390

来源：

REPORT OF NRL PROGRESS | 1973年 / SEP期

关键词：

D O I：

暂无

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

引用

页码：38 / 40

页数：3

共 50 条

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