TECHNIQUE FOR MONOLITHIC FABRICATION OF MICROLENS ARRAYS

被引:468
|
作者
POPOVIC, ZD [1 ]
SPRAGUE, RA [1 ]
CONNELL, GAN [1 ]
机构
[1] XEROX CORP, PALO ALTO RES CTR, PALO ALTO, CA 94304 USA
来源
APPLIED OPTICS | 1988年 / 27卷 / 07期
关键词
D O I
10.1364/AO.27.001281
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:1281 / 1284
页数:4
相关论文
共 50 条
  • [21] Micro fabrication of microlens arrays by micro dispensing
    Cheng, Hsin-Chung
    Wang, Chau-Hsiang
    Huang, Chiung-Fang
    Shen, Yung-Kang
    Lin, Yi
    Sheu, Dong-Yea
    Hu, Yi-Han
    POLYMERS FOR ADVANCED TECHNOLOGIES, 2010, 21 (09) : 632 - 639
  • [22] Fabrication technologies for chirped refractive microlens arrays
    Wippermann, F. C.
    Radtke, D.
    Zeitner, U.
    Duparre, J. W.
    Tuennermann, A.
    Amberg, M.
    Sinzinger, S.
    Reinhardt, C.
    Ovsianikov, A.
    Chichkov, B. N.
    CURRENT DEVELOPMENTS IN LENS DESIGN AND OPTICAL ENGINEERING VII, 2006, 6288
  • [23] Fabrication of microlens arrays by reactive ion milling
    Sankur, H
    Hall, R
    Motamedi, E
    Gunning, W
    Tennant, W
    MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MICROMECHANICS, 1996, 2687 : 150 - 155
  • [24] New technology for fabrication of polymer microlens arrays
    Wang, Wei
    Zhou, Changhe
    Zhongguo Jiguang/Chinese Journal of Lasers, 2009, 36 (11): : 2869 - 2872
  • [25] Monolithic silicon microlens arrays for far-infrared astrophysics
    Cothard, Nicholas F.
    Stevenson, Thomas
    Mateo, Jennette
    Costen, Nicholas
    Denis, Kevin
    Perido, Joanna
    Schrock, Ian
    Wang, Frederick
    Glenn, Jason
    APPLIED OPTICS, 2024, 63 (06) : 1481 - 1487
  • [26] Monolithic integration of 256×256 Si microlens arrays with infrared focal plane arrays
    Chen, Si-Hai
    Yi, Xin-Jian
    Wang, Hong-Chen
    Kong, Ling-Bin
    Ma, Hong
    Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves, 2001, 20 (05): : 340 - 342
  • [27] Development of Microlens Arrays: From Fabrication to Photonic Applications
    Li, Jianjun
    Chu, Chunyan
    Lu, Weitong
    Zhang, Pingping
    Yang, Gaoling
    Zhong, Haizheng
    Zhao, Yuejin
    Guangxue Xuebao/Acta Optica Sinica, 2021, 41 (21):
  • [28] Investigation of the Deposition of Microsphere Monolayers for Fabrication of Microlens Arrays
    Kumnorkaew, Pisist
    Ee, Yik-Khoon
    Tansu, Nelson
    Gilchrist, James F.
    LANGMUIR, 2008, 24 (21) : 12150 - 12157
  • [29] Design and fabrication of long focal length microlens arrays
    Hsieh, Hsin-Ta
    Lin, Vinna
    Hsieh, Jo-Lan
    Su, Guo-Dung John
    OPTICS COMMUNICATIONS, 2011, 284 (21) : 5225 - 5230
  • [30] Fabrication of the glass microlens arrays and the collimating property on nanolaser
    Huang, Xiaoping
    Wang, Peng
    Lin, En
    Jiao, Jiao
    Wang, Xiang
    Li, Yu
    Hou, Yumeng
    Zhao, Qing
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2016, 122 (07):