REMOVAL OF SMALL PARTICLES-DEPOSITED ON SOLID-SURFACES BY A FREEZING METHOD

被引：1

作者：

KOUSAKA, Y

HORIUCHI, T

ENDO, Y

NIIDA, T

机构：

[1] Dept. of Chem. Eng., Univ. of Osaka Pref., Sakai

来源：

KAGAKU KOGAKU RONBUNSHU | 1993年 / 19卷 / 04期

关键词：

CLEANING; PARTICLE REMOVAL; SURFACE; FREEZING METHOD;

D O I：

10.1252/kakoronbunshu.19.656

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

A new method of particle removal from solid surfaces, which will be called the ''freezing and melting method'', has been proposed. Substrates or materials to be cleaned are dipped into a certain liquid (ultrapure water with surfactant or methanol), and the liquid is frozen by liquid nitrogen and then melted. Submicron particles deposited on substrates (Si wafer and slide glass) were found to be effectively removed by this simple procedure. The main mechanisms of the particle removal are thought to be an expelling effect at the front of freezing (a kind of coacervation) and the difference in thermal shrinkage between frozen liquid and subtsrate.

引用

页码：656 / 662

页数：7