SPUTTERING OBSERVATIONS DURING BINARY ALLOY PRODUCTION BY ION-IMPLANTATION

被引：24
|
作者：
REYNOLDS, GW
KNUDSON, AR
GOSSETT, CR
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS | 1981年 / 182卷 / APR期
关键词：
Compendex;
D O I：
10.1016/0029-554X(81)90686-8
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
METALS AND ALLOYS
引用
收藏
页码：179 / 185
页数：7
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