LASER-INDUCED POLYMERIZATION OF SURFACE ADSORBED MOLECULES

被引：1

作者：

KIZAKI, Y

TAGUCHI, T

YAMAZAKI, S

机构：

[1] TOYOTA Central Research and Development Laboratories Inc, Aichi-gun, 480-11, 41-1, Yokomichi, Nagakute-chou

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1990年 / 29卷 / 08期

关键词：

Acrylic monomers; Laser-induced polymerization; Molecular beam; Preservation of chemical composition; Vacuum process;

D O I：

10.1143/JJAP.29.1561

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The controllability of the chemical composition of acrylic compounds was investigated in ultrathin polymerized films by using a polymerization process in vacuo with a vacuum UV excimer laser. Four different acrylic compounds were polymerized by this process. The analysis of X-ray photoelectron spectroscopy showed that the chemical compositions of polymer film from ethylacrylate were well-preserved monomer compositions. The insulation characteristics of the ultrathin films obtained from the optimized conditions were found to be sufficient for producing a MIS device on n-type GaAs substrates. © 1990 The Japan Society of Applied Physics.

引用

页码：1561 / 1567

页数：7

共 16 条

[1] LOW-TEMPERATURE UV LASER ETCHING OF PMMA - ON THE MECHANISM OF ABLATIVE PHOTODECOMPOSITION (APD) [J].

BRAREN, B ;

SEEGER, D .

JOURNAL OF POLYMER SCIENCE PART C-POLYMER LETTERS, 1986, 24 (08) :371-376

[2] APPLICATIONS OF ESCA TO POLYMER CHEMISTRY .10. CORE AND VALENCE ENERGY-LEVELS OF A SERIES OF POLYACRYLATES [J].

CLARK, DT ;

THOMAS, HR .

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1976, 14 (07) :1671-1700

[3]

CLARK DT, 1977, ADV POLYM SCI, V24, P127

[4] VELOCITY DISTRIBUTION OF MOLECULAR FRAGMENTS FROM POLYMETHYLMETHACRYLATE IRRADIATED WITH UV LASER-PULSES [J].

DANIELZIK, B ;

FABRICIUS, N ;

ROWEKAMP, M ;

VONDERLINDE, D .

APPLIED PHYSICS LETTERS, 1986, 48 (03) :212-214

[5] THE STICKING OF MAGNESIUM ON OMEGA-TRICOSENOIC ACID MULTILAYERS DEPOSITED BY THE LANGMUIR-BLODGETT TECHNIQUE [J].

GEDDES, NJ ;

SAMBLES, JR ;

JARVIS, DJ .

THIN SOLID FILMS, 1988, 167 (1-2) :261-268

[6] CALORIMETRIC AND ACOUSTIC STUDY OF ULTRAVIOLET-LASER ABLATION OF POLYMERS [J].

GORODETSKY, G ;

KAZYAKA, TG ;

MELCHER, RL ;

SRINIVASAN, R .

APPLIED PHYSICS LETTERS, 1985, 46 (09) :828-830

[7] FORMATION OF MIS STRUCTURE IN ORGANIC CELL AL/PB-PHTHALOCYANINE/ITO [J].

KANAYAMA, S ;

HIROI, M ;

OKUYAMA, N ;

YASUNAGA, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1983, 22 (02) :348-350

[8] ORGANIC HETEROJUNCTIONS UTILIZING 2 CONDUCTING POLYMERS - POLY(ACETYLENE) POLY(N-METHYLPYRROLE) JUNCTIONS [J].

KOEZUKA, H ;

HYODO, K ;

MACDIARMID, AG .

JOURNAL OF APPLIED PHYSICS, 1985, 58 (03) :1279-1284

[9] SCHOTTKY-BARRIER TYPE DIODE WITH AN ELECTROCHEMICALLY PREPARED CO-POLYMER HAVING PYRROLE AND N-METHYLPYRROLE UNITS [J].

KOEZUKA, H ;

ETOH, S .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (05) :2511-2516

[10]

MORT J, 1982, ELECTRONIC PROPERTIE, P273

← 1 2 →