LASER-INDUCED SURFACE DEFORMATIONS ON SILICON

被引：6
作者：
LUTHY, W
AFFOLTER, K
FUHRER, M
机构：
[1] Institute of Applied Physics, University of Bern
来源：
PHYSICS LETTERS A | 1979年 / 72卷 / 01期
关键词：
D O I：
10.1016/0375-9601(79)90527-9
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Permanent deformations on silicon surfaces in the form of bubbles, resulting from pulsed laser irradiation with fluences well above the threshold for melting, are studied. The mechanism leading to deformations is discussed and a possibility to avoid them is demonstrated. © 1979.
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页码：60 / 62
页数：3
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