INSITU X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF GAAS GROWN BY ATOMIC LAYER EPITAXY

被引:52
作者
KODAMA, K
OZEKI, M
MOCHIZUKI, K
OHTSUKA, N
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D O I
10.1063/1.100909
中图分类号
O59 [应用物理学];
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页码:656 / 657
页数:2
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