ELASTIC RELATIONSHIPS IN LAYERED COMPOSITE MEDIA WITH APPROXIMATION FOR THE CASE OF THIN-FILMS ON A THICK SUBSTRATE

被引:305
作者
TOWNSEND, PH [1 ]
BARNETT, DM [1 ]
BRUNNER, TA [1 ]
机构
[1] XEROX CORP, PALO ALTO RES CTR, PALO ALTO, CA 94304 USA
关键词
D O I
10.1063/1.339082
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:4438 / 4444
页数:7
相关论文
共 19 条
[1]   CALCULATION OF STRESS IN ELECTRODEPOSITS FROM THE CURVATURE OF A PLATED STRIP [J].
BRENNER, A ;
SENDEROFF, S .
JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS, 1949, 42 (02) :105-123
[2]  
Brunner T. A., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V633, P106, DOI 10.1117/12.963709
[3]   MISFIT STRESS IN INGAAS/INP HETEROEPITAXIAL STRUCTURES GROWN BY VAPOR-PHASE EPITAXY [J].
CHU, SNG ;
MACRANDER, AT ;
STREGE, KE ;
JOHNSTON, WD .
JOURNAL OF APPLIED PHYSICS, 1985, 57 (02) :249-257
[4]  
CUTHBERT JD, 1980, UNPUB APR IEEE SOL S
[5]  
DAVIDENKOV NN, 1961, SOV PHYS-SOL STATE, V2, P2595
[6]  
FENG ZC, 1983, J APPL PHYS, V54, P83, DOI 10.1063/1.331690
[7]   MEASUREMENT AND INTERPRETATION OF STRESS IN ALUMINUM-BASED METALLIZATION AS A FUNCTION OF THERMAL HISTORY [J].
FLINN, PA ;
GARDNER, DS ;
NIX, WD .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (03) :689-699
[8]   STRESSES INDUCED IN GAAS BY TIPT OHMIC CONTACTS [J].
HENEIN, GE ;
WAGNER, WR .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (11) :6395-6400
[9]  
Hoffman R. W., 1966, PHYS THIN FILMS, VVol. 3, pp. 211
[10]   CALCULATED STRESSES IN MULTILAYERED HETEROEPITAXIAL STRUCTURES [J].
OLSEN, GH ;
ETTENBERG, M .
JOURNAL OF APPLIED PHYSICS, 1977, 48 (06) :2543-2547