CHEMICAL VAPOR-DEPOSITION OF GERMANIUM FILMS BY LASER-INDUCED PHOTOLYSIS OF ETHYLGERMANES

被引：21

作者：

POLA, J ^{[1
]}

PARSONS, JP ^{[1
]}

TAYLOR, R ^{[1
]}

机构：

[1] UNIV SUSSEX,SCH CHEM & MOLEC SCI,BRIGHTON BN1 9QJ,E SUSSEX,ENGLAND

来源：

JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS | 1992年 / 88卷 / 12期

关键词：

D O I：

10.1039/ft9928801637

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Excimer laser photolysis of ethylgermanes EtnGeH4-n (n = 1-4) at 193 nm yields ethane, ethene and butane along with germanium deposited on the inner surface of the reactor. The distribution of gaseous products is remarkably different from that produced by thermolysis of ethylgermanes and it is attributed to intramolecular elimination of hydrocarbons. The amounts of hydrocarbons formed, as well as the infrared and energy-dispersive X-ray spectra of the solids, reveal that carbon and hydrogen of the ethylgermanes are contained in the volatile photolysis products, while germanium is the dominant element of the deposit. Ethylgermanes are much more prone to photolytic decomposition than germane, which makes them more suitable precursors for photolytic deposition of germanium. The form and morphology of the deposited layers have been investigated.

引用

页码：1637 / 1641

页数：5

共 52 条

[1] LOW-TEMPERATURE GROWTH OF POLYCRYSTALLINE SI AND GE FILMS BY ULTRAVIOLET-LASER PHOTO-DISSOCIATION OF SILANE AND GERMANE [J].

ANDREATTA, RW ;

ABELE, CC ;

OSMUNDSEN, JF ;

EDEN, JG ;

LUBBEN, D ;

GREENE, JE .

APPLIED PHYSICS LETTERS, 1982, 40 (02) :183-185

[2]

AVIGAL Y, 1978, J ELECTROCHEM SOC, V122, P1226

[3] THE EPITAXY OF GERMANIUM ON GALLIUM-ARSENIDE [J].

AYERS, JE ;

GHANDHI, SK .

JOURNAL OF CRYSTAL GROWTH, 1988, 89 (04) :371-377

[4] TUNABLE UV LASER PHOTOLYSIS OF ORGANOMETALLICS WITH PRODUCT DETECTION BY LASER MASS-SPECTROSCOPY - TRIMETHYLALUMINUM [J].

BEUERMANN, T ;

STUKE, M .

APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1989, 49 (02) :145-148

[5] SIF4-SENSITIZED DECOMPOSITION OF GEH4 BY A PULSED CO2 TEA LASER [J].

BLAZEJOWSKI, J ;

LAMPE, FW .

JOURNAL OF PHYSICAL CHEMISTRY, 1989, 93 (24) :8038-8045

[6]

CARLSSON DJ, 1969, INT J CHEM KINET, V1, P315

[7] THE GE-H BOND-DISSOCIATION ENERGIES OF ORGANOGERMANES - A LASER-INDUCED PHOTOACOUSTIC STUDY [J].

CLARK, KB ;

GRILLER, D .

ORGANOMETALLICS, 1991, 10 (03) :746-750

[8] COMBINATION AND DISPROPORTIONATION OF ETHYL RADICALS IN GAS, LIQUID, AND SOLID PHASES - SOME REMARKS ABOUT TRANSITION STATE OF THESE PROCESSES [J].

DIXON, PS ;

STEFANI, AP ;

SZWARC, M .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1963, 85 (17) :2551-&

[9] THE MECHANISM AND KINETICS OF THE HOMOGENEOUS GAS-PHASE THERMAL-DECOMPOSITION OF METHYLGERMANE [J].

DZARNOSKI, J ;

ONEAL, HE ;

RING, MA .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1981, 103 (19) :5740-5746

[10] THE MECHANISM OF THE GAS-PHASE PYROLYSIS OF ESTERS .13. THE VERY STRONG ACTIVATING EFFECTS OF BETA-TRIALKYLMETAL GROUPS [J].

EABORN, C ;

MAHMOUD, FMS ;

TAYLOR, R .

JOURNAL OF THE CHEMICAL SOCIETY-PERKIN TRANSACTIONS 2, 1982, (10) :1313-1319

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