HIGH-ACCURACY QUARTZ CRYSTAL THIN-FILM MONITOR

被引：11

作者：

RAMADAN, B ^{[1
]}

PIYAKIS, K ^{[1
]}

KOS, JF ^{[1
]}

机构：

[1] UNIV REGINA,DEPT PHYS & ASTRON,REGINA S4S 0A2,SASKATCHEWAN,CANADA

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1979年 / 50卷 / 07期

关键词：

D O I：

10.1063/1.1135941

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A quartz resonator thin film monitor of exceptionally high accuracy and resolution has been developed. It is capable of providing measurements with an effective resolution of 0.001 nm and a corresponding relative accuracy of about 1% for a 0.100-nm-thick film of gold. A novel dual oscillator and mixer using integrated circuits is also described.

引用

页码：867 / 871

页数：5

共 4 条

[1] LONG-TERM OPERATION OF CRYSTAL OSCILLATORS IN THIN-FILM DEPOSITION [J].

BEHRNDT, KH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (05) :622-&

[2] DIGITAL QUARTZ DEPOSITION MONITOR USING A MICROPROCESSOR [J].

HAMMER, D ;

BENES, E ;

PULKER, HK .

THIN SOLID FILMS, 1976, 32 (01) :47-50

[3]

PULKER HK, 1967, Z ANGEW PHYSIK, V23, P15

[4] PROGRESS IN MONITORING THIN-FILM THICKNESS WITH QUARTZ CRYSTAL RESONATORS [J].

PULKER, HK ;

BENES, E ;

HAMMER, D ;

SOLLNER, E .

THIN SOLID FILMS, 1976, 32 (01) :27-33

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