CALIBRATION OF SURFACE HEIGHTS IN AN INTERFEROMETRIC OPTICAL PROFILER

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作者：
CREATH, K
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来源：
SURFACE CHARACTERIZATION AND TESTING II | 1989年 / 1164卷
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中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
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页码：91 / 98
页数：8
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