SURFACE CESIUM CONCENTRATIONS IN CESIUM-ION-BOMBARDED ELEMENTAL AND COMPOUND TARGETS

被引:49
作者
CHELGREN, JE
KATZ, W
DELINE, VR
EVANS, CA
BLATTNER, RJ
WILLIAMS, P
机构
[1] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801
[2] UNIV ILLINOIS,SCH CHEM SCI,URBANA,IL 61801
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 02期
关键词
CESIUM AND ALLOYS;
D O I
10.1116/1.569939
中图分类号
O59 [应用物理学];
学科分类号
摘要
Auger electron spectrometry has been used to characterize the atomic cesium concentration left bracket Cs right bracket //a at the surface of cesium ion bombarded silicon and various metal silicides. The Si** minus ion yield was found to be proportional to left bracket Cs right bracket //v**2**. **8**+36**0**. **1. Surface cesium concentration was also found to increase with increasing inverse sputtering yield S** minus **1 of the substrate. Deviations from a linear dependence of left bracket Cs right bracket //v on S** minus **1 are ascribed to differential sputtering effects.
引用
收藏
页码:324 / 327
页数:4
相关论文
共 17 条
[1]  
Andersen CA., 1970, INT J MASS SPECTROM, V3, P413, DOI [10.1016/0020-7381(70)80001-8, DOI 10.1016/0020-7381(70)80001-8]
[2]  
BERNHEIM M, 1977, J PHYS LETT-PARIS, V38, pL325, DOI 10.1051/jphyslet:019770038015032500
[3]  
CHANG CC, 1974, CHARACTERIZATION SOL
[4]   UNIFIED EXPLANATION FOR SECONDARY ION YIELDS [J].
DELINE, VR ;
EVANS, CA ;
WILLIAMS, P .
APPLIED PHYSICS LETTERS, 1978, 33 (07) :578-580
[5]  
DELINE VR, 1978, APPL PHYS LETT, V33, P830
[6]   RELATIVE SENSITIVITY FACTORS FOR QUANTITATIVE AUGER ANALYSIS OF BINARY-ALLOYS [J].
HALL, PM ;
MORABITO, JM ;
CONLEY, DK .
SURFACE SCIENCE, 1977, 62 (01) :1-20
[7]  
LIAU ZL, 1978, J APPL PHYS, V49, P5292
[8]   SECONDARY-ION MASS-SPECTROMETRY AND ITS USE IN DEPTH PROFILING [J].
LIEBL, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01) :385-391
[9]   THIN-FILMS AND SOLID-PHASE REACTIONS [J].
MAYER, JW ;
POATE, JM ;
TU, KN .
SCIENCE, 1975, 190 (4211) :228-234
[10]  
MAYER JW, 1974, ION BEAM SURFACE LAY