BAND DIAGRAM AND CONDUCTIVITY OF SILICON OXYNITRIDE FILMS

被引:29
作者
GRITSENKO, VA
DIKOVSKAJA, ND
MOGILNIKOV, KP
机构
关键词
D O I
10.1016/0040-6090(78)90299-7
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:353 / 357
页数:5
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