ELECTRICAL-PROPERTIES OF ANODIC AND PYROLYTIC DIELECTRICS ON GALLIUM-ARSENIDE

被引：88

作者：

ZEISSE, CR ^{[1
]}

MESSICK, LJ ^{[1
]}

LILE, DL ^{[1
]}

机构：

[1] OCEAN SYST CTR, DIV ELECTR MAT SCI DIVISION, SAN DIEGO, CA 92152 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 04期

关键词：

D O I：

10.1116/1.569399

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：957 / 960

页数：4

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