TANTALUM SILICIDE FILMS DEPOSITED BY DC SPUTTERING

被引：27
作者：
ANGILELLO, J
BAGLIN, JEE
CARDONE, F
DEMPSEY, JJ
DHEURLE, FM
IRENE, EA
MACINNES, R
PETERSSON, CS
SAVOY, R
SEGMULLER, AP
TIERNEY, E
机构：
来源：
JOURNAL OF ELECTRONIC MATERIALS | 1981年 / 10卷 / 01期
关键词：
D O I：
10.1007/BF02654902
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：59 / 93
页数：35
相关论文
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