PARADOXICAL SPATIAL-DISTRIBUTION OF THE ELECTRON-TEMPERATURE IN A LOW-PRESSURE RF DISCHARGE

被引：94
作者：
GODYAK, VA
PIEJAK, RB
机构：
[1] Osram Sylvania Inc., Danvers
来源：
APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 23期
关键词：
D O I：
10.1063/1.110227
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Spatially resolved probe measurements of the electron energy distribution function (EEDF) in a capacitive rf discharge in argon reveal that the electron temperature decreases with increasing plasma heating rf field. This paradoxical behavior in the electron temperature distribution in an inhomogeneous rf field is shown to be the combined effect of nonlocal electron kinetics and a non-Maxwellian EEDF typical of a low pressure capacitive rf discharge in a Ramsauer gas.
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页码：3137 / 3139
页数：3
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