CRITICAL ASSESSMENT AND MODIFICATION OF ROBINSONS METHOD FOR ELLIPSOMETRIC INVESTIGATION OF THIN-FILM MATERIALS

被引：3

作者：

KRUMME, JP ^{[1
]}

HABERKAMP, J ^{[1
]}

机构：

[1] PHILIPS FORSCH LAB GMBH, HAMBURG 54, WEST GERMANY

来源：

关键词：

D O I：

10.1016/0040-6090(72)90303-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：335 / 339

页数：5

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