MICROWAVE CVD DEPOSITION OF DIAMOND THIN-FILMS WITH APPLICATIONS

被引：0
|
作者：
YEHODA, JE [1 ]
GUARNIERI, CR [1 ]
WHITEHAIR, SJ [1 ]
CUOMO, JJ [1 ]
机构：
[1] IBM CORP,RES DIV,YORKTOWN HTS,NY 10598
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1991年 / 202卷
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：92 / PHYS
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