STRUCTURAL ORIGIN OF SURFACE MORPHOLOGICAL MODIFICATIONS DEVELOPED ON POLY(ETHYLENE-TEREPHTHALATE) BY EXCIMER LASER PHOTOABLATION

被引：82

作者：

NOVIS, Y

PIREAUX, JJ

BREZINI, A

PETIT, E

CAUDANO, R

LUTGEN, P

FEYDER, G

LAZARE, S

机构：

[1] DUPONT NEMOURS,DEPT RES & DEV,L-2984 CONTERN,LUXEMBOURG

[2] UNIV BORDEAUX 1,F-33405 TALENCE,FRANCE

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 01期

关键词：

D O I：

10.1063/1.341436

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：365 / 370

页数：6

共 18 条

[1] DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER
ANDREW, JE
DYER, PE
FORSTER, D
KEY, PH
[J]. APPLIED PHYSICS LETTERS, 1983, 43 (08) : 717 - 719
[2] DIRECT-ETCHING STUDIES OF POLYMER-FILMS USING A 157-NM F2 LASER
DYER, PE
SIDHU, J
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1986, 3 (05) : 792 - 795
[3] DEVELOPMENT AND ORIGIN OF CONICAL STRUCTURES ON XECL LASER ABLATED POLYIMIDE
DYER, PE
JENKINS, SD
SIDHU, J
[J]. APPLIED PHYSICS LETTERS, 1986, 49 (08) : 453 - 455
[4] EHRLICH DJ, 1983, J VAC SCI TECHNOL B, V1, P969, DOI 10.1116/1.582718
[5] REGULARLY ARRANGED SUPERSTRUCTURES ON STRETCHED HIGH POLYMERS
KAEMPF, G
ORTH, H
[J]. JOURNAL OF MACROMOLECULAR SCIENCE-PHYSICS, 1975, B 11 (02): : 151 - 164
[6] KAEMPF G, 1975, PROGR COLLOID POLYME, V57, P249
[7] EMISSION-SPECTRA AND ETCHING OF POLYMERS AND GRAPHITE IRRADIATED BY EXCIMER LASERS
KOREN, G
YEH, JTC
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 56 (07) : 2120 - 2126
[8] EMISSION-SPECTRA, SURFACE QUALITY, AND MECHANISM OF EXCIMER LASER ETCHING OF POLYIMIDE FILMS
KOREN, G
YEH, JTC
[J]. APPLIED PHYSICS LETTERS, 1984, 44 (12) : 1112 - 1114
[9] SURFACE-PROPERTIES OF POLY(ETHYLENE-TEREPHTHALATE) FILMS MODIFIED BY FAR-ULTRAVIOLET RADIATION AT 193-NM (LASER) AND 185-NM (LOW INTENSITY)
LAZARE, S
SRINIVASAN, R
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1986, 90 (10) : 2124 - 2131
[10] DIRECT AND ACCURATE MEASUREMENT OF ETCH RATE OF POLYMER-FILMS UNDER FAR-UV IRRADIATION
LAZARE, S
SOULIGNAC, JC
FRAGNAUD, P
[J]. APPLIED PHYSICS LETTERS, 1987, 50 (10) : 624 - 625

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