EFFICIENCY OF A CAPACITOR-TRANSFER-TYPE DISCHARGE EXCIMER LASER WITH AUTOMATIC PREIONIZATION

被引：32
作者：
MIYAZAKI, K
HASAMA, T
YAMADA, K
FUKATSU, T
EURA, T
SATO, T
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 08期
关键词：
D O I：
10.1063/1.337102
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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收藏
页码：2721 / 2728
页数：8
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