ANNEALING EFFECT ON PERPENDICULAR MAGNETIC-ANISOTROPY IN BIAS SPUTTERED CO/PT MULTILAYERS

被引：5
作者：
HONDA, S
MORITA, N
AGO, J
TAMURA, Y
NAWATE, M
机构：
[1] Physical Electronics, Faculty of Engineering, Hiroshima University, Higashi-Hiroshima, 724
来源：
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 1993年 / 121卷 / 1-3期
关键词：
D O I：
10.1016/0304-8853(93)91255-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The surface and volume magnetic anisotropies, K(s) and K(v), of Co/Pt multilayers sputter-deposited under substrate bias voltage have been investigated. Annealing in vacuum causes atomic diffusion and the relaxation of stress, resulting in a change in the magnetic anisotropy; K(s) decreases, while K(v) increases.
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页码：506 / 509
页数：4
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