REACTIVELY SPUTTERED SILICON OXYNITRIDE AS A DIELECTRIC MATERIAL FOR METAL-INSULATOR-METAL CAPACITORS

被引：21
|
作者：
FRANK, RI
MOBERG, WL
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1970年 / 117卷 / 04期
关键词：
D O I：
10.1149/1.2407560
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：524 / &
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