REDUCTION IN THE SIZE OF FEATURES OF PATTERNED SAMS GENERATED BY MICROCONTACT PRINTING WITH MECHANICAL COMPRESSION OF THE STAMP

被引：72

作者：

XIA, YN ^{[1
]}

WHITESIDES, GM ^{[1
]}

机构：

[1] HARVARD UNIV,DEPT CHEM,CAMBRIDGE,MA 02138

来源：

ADVANCED MATERIALS | 1995年 / 7卷 / 05期

关键词：

D O I：

10.1002/adma.19950070513

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Sub-micron size features can now be produced using the microcontact printing technique. The elastomeric stamp used to produce the features in self-assembled monolayers (see figure) is mechanically compressed both one- and two-dimensionally, resulting in a reduction of the size of the features by up to a factor of almost ten (e.g. 2.5 mu m to 0.2 mu m) while retaining the spatial regularities in the pattern.

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页码：471 / 473

页数：3

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