THERMAL-OXIDATION OF SPUTTERED TIN DIFFUSION-BARRIERS

被引:13
作者
SIGURD, D [1 ]
SUNI, I [1 ]
WIELUNSKI, L [1 ]
NICOLET, MA [1 ]
VONSEEFELD, H [1 ]
机构
[1] CALTECH, PASADENA, CA 91125 USA
来源
SOLAR CELLS | 1981年 / 5卷 / 01期
关键词
D O I
10.1016/0379-6787(81)90018-1
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
引用
收藏
页码:81 / 86
页数:6
相关论文
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[4]  
Chu WK., 1978, BACKSCATTERING SPECT
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[7]  
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MAENPAA M, 1981, SOL ENERGY, V27
[10]   DIFFUSION BARRIERS IN THIN-FILMS [J].
NICOLET, MA .
THIN SOLID FILMS, 1978, 52 (03) :415-443