ION-IMPLANTATION EFFECTS IN NONCRYSTALLINE SIO2

被引：128

作者：

ARNOLD, GW ^{[1
]}

机构：

[1] SANDIA LABS,ALBUQUERQUE,NM 87115

来源：

IEEE TRANSACTIONS ON NUCLEAR SCIENCE | 1973年 / NS20卷 / 06期

关键词：

D O I：

10.1109/TNS.1973.4327397

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：220 / 223

页数：4

共 13 条

[1] RADIATION EFFECTS IN SILICA AT LOW TEMPERATURES [J].

ARNOLD, GW ;

COMPTON, WD .

PHYSICAL REVIEW, 1959, 116 (04) :802-811

[2] ELECTRONIC STRUCTURE OF DEFECT CENTERS IN SIO2 [J].

BENNETT, AJ ;

ROTH, LM .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1971, 32 (06) :1251-&

[3] NEUTRON SPECIFIC COLOR CENTER IN FUSED SILICA AND AN IMPURITY BAND OF IDENTICAL WAVELENGTH [J].

COHEN, AJ .

PHYSICAL REVIEW, 1957, 105 (04) :1151-1155

[4]

GARINOCANINA V, 1956, CR HEBD ACAD SCI, V242, P1982

[5] MODEL FOR RADIATION-INDUCED CHARGE TRAPPING AND ANNEALING IN OXIDE LAYER OF MOS DEVICES [J].

GWYN, CW .

JOURNAL OF APPLIED PHYSICS, 1969, 40 (12) :4886-+

[6]

HETHERINGTON G, 1965, PHYS CHEM GLASSES, V6, P6

[7] PARALLEL BETWEEN SURFACE STATES AT SI-SIO2 INTERFACE AND B2 CENTER IN IRRADIATED SIO2 [J].

HICKMOTT, TW .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (01) :311-+

[8] THE OPTICAL EFFECTS OF RADIATION INDUCED ATOMIC DAMAGE IN QUARTZ [J].

MITCHELL, EWJ ;

PAIGE, EGS .

PHILOSOPHICAL MAGAZINE, 1956, 1 (12) :1085-1115

[9] OPTICAL ABSORPTION IN IRRADIATED QUARTZ AND FUSED SILICA [J].

NELSON, CM ;

CRAWFORD, JH .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1960, 13 (3-4) :296-305

[10]

VANWIERINGEN JS, 1959, ARCH SCI GENEVA, V12, P203

← 1 2 →