DC Magnetron Sputtered Mo-Ti Oxide Films for Color Neutral Electrochromic Devices

被引：6

作者：

Kullman, L. ^{[1
]}

Azens, A. ^{[1
]}

Gutarra, A. ^{[1
]}

Granqvist, C. G. ^{[1
]}

机构：

[1] Uppsala Univ, Dept Technol, S-75121 Uppsala, Sweden

来源：

IONICS | 1995年 / 1卷 / 04期

关键词：

D O I：

10.1007/BF02390216

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Mo-Ti oxide films with compositions ranging from MoO(3) to TiO(2) were prepared by reactive DC magnetron sputtering using a newly developed high-rate technique with interacting plasma zones. Optical and electrochemical measurements showed that an increase of the Ti content yielded increased electrochemical stability, decreased coloration efficiency, and increased potential for electrochromic coloration. The films have interesting properties for color-neutral electrochromic devices.

引用

页码：338 / 341

页数：4

共 10 条

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