LOW-OPTICAL-LOSS GLASS THIN-FILMS

被引：7

作者：

GUPTA, MC

机构：

[1] Eastman Kodak Company, Diversified Technologies Group, Research Laboratories, Rochester, NY

来源：

APPLIED OPTICS | 1990年 / 29卷 / 28期

关键词：

Integrated optics; Optical materials; Thin films;

D O I：

10.1364/AO.29.004310

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Low-optical-loss glass thin films have been prepared using sputtering and electron beam deposition methods. Results of film composition and optical property measurements are presented. Glass films have been prepared with optical loss values of 0.5 dB/cm. We discuss factors limiting the reduction in optical loss for sputtered and vapor-deposited films. These films can be easily patterned using standard photolithographic processes for fabrication of integrated optics components, such as grating couplers and planar lenses. © 1990 Optical Society of America.

引用

收藏

页码：4310 / 4313

页数：4

相关论文

共 13 条

[1] PROPERTIES OF 4-LAYER PLANAR OPTICAL WAVE-GUIDES NEAR CUTOFF [J].

BORLAND, WC ;

ZELMON, DE ;

RADENS, CJ ;

BOYD, JT ;

JACKSON, HE .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1987, 23 (07) :1172-1179

[2] REDUCTION OF SCATTERING FROM A GLASS THIN-FILM OPTICAL-WAVEGUIDE BY CO2-LASER ANNEALING [J].

DUTTA, S ;

JACKSON, HE ;

BOYD, JT .

APPLIED PHYSICS LETTERS, 1980, 37 (06) :512-514

[3] SPUTTERED GLASS WAVEGUIDE FOR INTEGRATED OPTICAL CIRCUITS [J].

GOELL, JE ;

STANDLEY, RD .

BELL SYSTEM TECHNICAL JOURNAL, 1969, 48 (10) :3445-+

[4] BARIUM SILICATE FILMS FOR INTEGRATED OPTICAL CIRCUITS [J].

GOELL, JE .

APPLIED OPTICS, 1973, 12 (04) :737-742

[5] LOW-LOSS SI3N4-SIO2 OPTICAL WAVE-GUIDES ON SI [J].

HENRY, CH ;

KAZARINOV, RF ;

LEE, HJ ;

ORLOWSKY, KJ ;

KATZ, LE .

APPLIED OPTICS, 1987, 26 (13) :2621-2624

[6] SOME PROPERTIES OF RF PLANAR MAGNETRON-SPUTTERED CORNING-7059 GLASS-FILMS [J].

JEROMINEK, H ;

PATELA, S ;

POMERLEAU, JYD ;

DELISLE, C ;

TREMBLAY, R .

THIN SOLID FILMS, 1987, 146 (02) :191-200

[7] OPTICAL LOSSES OF EVAPORATION-DEPOSITED DIELECTRIC WAVEGUIDES [J].

KERSTEN, RT ;

MAHLEIN, HF ;

RAUSCHER, W .

THIN SOLID FILMS, 1975, 28 (02) :369-374

[8]

Levin E.M., 1964, MGO FEO SIO2 PHASE D

[9] RF SPUTTERED THIN-FILMS FOR INTEGRATED OPTICAL COMPONENTS [J].

PITT, CW ;

GFELLER, FR ;

STEVENS, RJ .

THIN SOLID FILMS, 1975, 26 (01) :25-51

[10]

SHIMOTO Y, 1974, JPN J APPL PHYS S, V2, P701