UNIQUE HYDRIDE CHEMISTRY ON SILICON-PH3 INTERACTION WITH SI(100)-(2X1)

被引:47
作者
COLAIANNI, ML
CHEN, PJ
YATES, JT
机构
[1] University of Pittsburgh, Pittsburgh, Pennsylvania
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1994年 / 12卷 / 06期
基金
欧盟第七框架计划;
关键词
D O I
10.1116/1.578927
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The dissociative adsorption of phosphine (PH 3) on Si(100)-(2X1) and its high temperature thermal behavior have been studied by high-resolution electron energy loss spectroscopy (HREELS), Auger electron spectroscopy, and by temperature programmed desorption (TPD). Phosphine adsorbs dissociatively onto Si(100)-(2Xl) at 100 K as PH 2 and H species, as revealed by vibrational bands at 1050 cm-1[£SC (PH 2)] and 2100 cm' 1 [r lt;Si-H)]. The PH 2 (a) undergoes thermal decomposition to adsorbed P and H near 650 K, as determined by HREELS. TPD measurements reveal two PH 3 desorption processes at 485 and 635 K. The 635 K desorption is shown to result from PH 2 +H recombination, while the mechanism for the 485 K desorption cannot be definitely identified. Additionally, two H 2 desorption states were observed at 685 and 770 K. © 1994, American Vacuum Society. All rights reserved.
引用
收藏
页码:2995 / 2998
页数:4
相关论文
共 24 条
[1]   METHODS IN SEMICONDUCTOR SURFACE-CHEMISTRY [J].
BOZACK, MJ ;
MUEHLHOFF, L ;
RUSSELL, JN ;
CHOYKE, WJ ;
YATES, JT .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (01) :1-8
[2]   DESIGN CONSIDERATIONS FOR SIMPLE GAS DOSERS IN SURFACE SCIENCE APPLICATIONS [J].
CAMPBELL, CT ;
VALONE, SM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (02) :408-411
[3]   IMPROVED DATA ACQUISITION AND SMOOTHING METHODS IN HIGH-RESOLUTION ELECTRON-ENERGY LOSS SPECTROSCOPY [J].
CHEN, PJ ;
COLAIANNI, ML ;
YATES, JT .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (02) :764-768
[4]   DISSOCIATIVE ADSORPTION OF PH3 ON SI(111)-(7 X 7) - A HIGH-RESOLUTION ELECTRON-ENERGY LOSS SPECTROSCOPY STUDY [J].
CHEN, PJ ;
COLAIANNI, ML ;
WALLACE, RM ;
YATES, JT .
SURFACE SCIENCE, 1991, 244 (03) :177-184
[5]   SILICON BACKBOND STRAIN EFFECTS ON NH3 SURFACE-CHEMISTRY - SI(111)-(7X7) COMPARED TO SI(100)-(2X1) [J].
CHEN, PJ ;
COLAIANNI, ML ;
YATES, JT .
SURFACE SCIENCE, 1992, 274 (03) :L605-L610
[6]   THE STEPWISE DISSOCIATION OF NH3 ON THE SI(111)-(7X7) SURFACE - LOW-TEMPERATURE DISSOCIATIVE ADSORPTION AND THERMAL EFFECTS [J].
COLAIANNI, ML ;
CHEN, PJ ;
YATES, JT .
JOURNAL OF CHEMICAL PHYSICS, 1992, 96 (10) :7826-7837
[7]  
COLAIANNI ML, UNPUB
[8]   SURFACE SENSITIVE SPECTROSCOPIC STUDY OF THE INTERACTION OF OXYGEN WITH A1(111) - LOW-TEMPERATURE CHEMISORPTION AND OXIDATION [J].
CROWELL, JE ;
CHEN, JG ;
YATES, JT .
SURFACE SCIENCE, 1986, 165 (01) :37-64
[9]   THE ADSORPTION AND DECOMPOSITION OF NH3 ON SI(100) - DETECTION OF THE NH2(A) SPECIES [J].
DRESSER, MJ ;
TAYLOR, PA ;
WALLACE, RM ;
CHOYKE, WJ ;
YATES, JT .
SURFACE SCIENCE, 1989, 218 (01) :75-107
[10]  
FROITZHEIM H, 1988, CHEM PHYSICS SOLID S