On the preparation and characterization of thin NiTi shape memory alloy wires for MEMS

被引:1
|
作者
Casati, Riccardo [1 ]
Vedani, Maurizio [1 ]
Tofail, Syed A. M. [2 ]
Dikinson, Calum [2 ]
Tuissi, Ausonio [3 ]
机构
[1] Politecn Milan, Dept Mech Engn, Via Masa 34, Milan, Italy
[2] Univ Limerick, Mat & Surface Sci Inst, Limerick, Ireland
[3] Natl Res Council CNR IENI, Corso Promessi Sposi 29, Lecce, Italy
来源
FRATTURA ED INTEGRITA STRUTTURALE | 2013年 / 23期
关键词
Shape memory alloys; SMA; MEMS; Thin wire; Actuators; TEM;
D O I
10.3221/IGF-ESIS.23.01
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Shape memory alloy (SMA) wires are employed as actuators in small devices for consumer electronics, valves and automotive applications. Because of the continued miniaturization of all the industrial products, nowadays the tendency is to produce MEMS (micro electromechanical systems). Among the most promising functional MEMS materials, the thin SMA wires that are offering a rapid actuating response with high power/weigh ratio of the material, are attracting a world wide interest. This paper is aimed at showing the production process and the characterizations of thin NiTi shape memory wires. The activity was focused on drawing procedure and on functional and TEM characterizations of the final products. In particular, it was evaluated the performance of the SMA wires for actuators in terms of functional fatigue and thermo-mechanical properties by means of an experimental apparatus design ad hoc for these specific tests.
引用
收藏
页码:7 / 12
页数:6
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