EFFECTS OF THE FILM THICKNESS ON THE INTERFACIAL REACTION OF PT/(111)SI

被引：3

作者：

CHEN, JR ^{[1
]}

CHANG, LD ^{[1
]}

YEH, FS ^{[1
]}

机构：

[1] NATL TSING HUA UNIV, DEPT ELECT ENGN, HSINCHU 30043, TAIWAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.576283

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1345 / 1349

页数：5

共 16 条

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