MEASUREMENTS OF HYDROGEN IN METAL-OXIDE-SEMICONDUCTOR STRUCTURES USING NUCLEAR-REACTION PROFILING

被引：37
作者：
MARWICK, AD
YOUNG, DR
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 07期
关键词：
D O I：
10.1063/1.341043
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：2291 / 2298
页数：8
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