COSI2 MICROSTRUCTURES BY MEANS OF A HIGH-CURRENT FOCUSED ION-BEAM

被引：43
|
作者：
BISCHOFF, L
TEICHERT, J
HESSE, E
PANKNIN, D
SKORUPA, W
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期
关键词：
D O I：
10.1116/1.587463
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：3523 / 3527
页数：5
相关论文
共 50 条
  • [1] Ion beam synthesis of CoSi2 - Microstructures by means of a high current focused ion beam
    Bischoff, L
    Teichert, J
    Hesse, E
    Panknin, D
    Skorupa, W
    ION BEAM MODIFICATION OF MATERIALS, 1996, : 933 - 936
  • [2] FOCUSED ION-BEAM SYSTEM WITH HIGH-CURRENT DENSITY
    BISCHOFF, L
    HESSE, E
    JANSSEN, D
    NAEHRING, FK
    NOTZOLD, F
    SCHMIDT, G
    TEICHERT, J
    MICROELECTRONIC ENGINEERING, 1991, 13 (1-4) : 367 - 370
  • [3] RESISTIVITY OF ION-BEAM SYNTHESIZED COSI2
    SEALY, BJ
    TAN, BL
    GWILLIAM, RM
    REESON, KJ
    JEYNES, C
    ELECTRONICS LETTERS, 1989, 25 (22) : 1532 - 1533
  • [4] WRITING IMPLANTATION WITH A HIGH-CURRENT DENSITY FOCUSED ION-BEAM
    BISCHOFF, L
    HESSE, E
    PANKNIN, D
    SKORUPA, W
    TEICHERT, J
    MICROELECTRONIC ENGINEERING, 1994, 23 (1-4) : 115 - 118
  • [5] FOCUSED ION-BEAM INDUCED DEPOSITION IN THE HIGH-CURRENT DENSITY REGION
    TAKAHASHI, Y
    MADOKORO, Y
    ISHITANI, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (11B): : 3233 - 3237
  • [6] SEGREGATION OF DOPANTS IN ION-BEAM SYNTHESIZED COSI2 LAYERS
    REESON, KJ
    HUNT, TD
    GWILLIAM, RM
    SEALY, BJ
    SPRAGGS, RS
    MEEKISON, CD
    BOOKER, GR
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 : 851 - 856
  • [7] Focused ion-beam structuring of Si and Si/CoSi2 heterostructures using adsorbed hydrogen as a resist
    Fuhrmann, H
    Döbeli, M
    Mühle, R
    Suter, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (03): : 945 - 948
  • [8] ION-BEAM SYNTHESIS OF HETEROEPITAXIAL SI/COSI2/SI STRUCTURES
    VANOMMEN, AH
    BULLELIEUWMA, CWT
    OTTENHEIM, JJM
    THEUNISSEN, AML
    JOURNAL OF APPLIED PHYSICS, 1990, 67 (04) : 1767 - 1778
  • [9] FORMATION OF COSI2 BY ION-BEAM MIXING AND RAPID THERMAL ANNEALING
    NIEWOHNER, L
    DEPTA, D
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 : 523 - 527
  • [10] EXTRACTION AND TRANSPORT OF THE HIGH-CURRENT ION-BEAM
    CHUNG, KH
    CHOI, BH
    KIM, W
    KO, SK
    PROCEEDINGS OF THE 1989 IEEE PARTICLE ACCELERATOR CONFERENCE, VOLS 1-3: ACCELERATOR SCIENCE AND TECHNOLOGY, 1989, : 688 - 690
12345